Studies of the earliest stages of plasma-enhanced chemical vapor deposition of SiO 2 on polymeric substrates

Author： Dennler G. Houdayer A. Latreche M. Segui Y. Wertheimer M.R.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.382, Iss.1, 2001-02, pp. : 1-3

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