Thin silicon films ranging from amorphous to nanocrystalline obtained by hot-wire CVD

Author: Soler D.   Fonrodona M.   Voz C.   Bertomeu J.   Andreu J.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.383, Iss.1, 2001-02, pp. : 189-191

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Abstract