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Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. : 101-104

Elsevier

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The role of hydrogen dilution of silane and phosphorus doping on hydrogenated microcrystalline silicon ( c-Si:H) films prepared by hot-wire chemical vapor deposition (HW-CVD) technique

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Light-induced creation of metastable defects in hydrogenated amorphous silicon carbide

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Philosophical Magazine B, Vol. 81, Iss. 6, 2001-06 ,pp. : 629-636

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High-stability hydrogenated amorphous silicon films for light-soaking prepared by catalytic CVD at high deposition rates

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Thin Solid Films, Vol. 395, Iss. 1, 2001-09 ,pp. : 138-141

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High-rate deposition of amorphous silicon films using hot-wire CVD with a coil-shaped filament

By Povolny H.S.   Deng X.  

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