Atomic layer deposition of BN thin films

Author: Marlid B.   Ottosson M.   Pettersson U.   Larsson K.   Carlsson J.-O.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.402, Iss.1, 2002-01, pp. : 167-171

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Abstract