Coverage properties of silicon nitride film prepared by the Cat-CVD method

Author: Osono S.   Uchiyama Y.   Kitazoe M.   Saito K.   Hayama M.   Masuda A.   Izumi A.   Matsumura H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 165-169

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Abstract