Fabrication of a-Si 1-x C x :H thin films for solar cells by the Cat-CVD method using a carbon catalyzer

Author: Sugita K.   Itoh M.   Masuda A.   Matsumura H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.430, Iss.1, 2003-04, pp. : 170-173

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Abstract