Quantitative analysis of a-Si 1-x C x :H thin films by vibrational spectroscopy and nuclear methods

Author： Gracin D. Bogdanovic I. Borjanovic V. Jaksic M. Pastuovic Z. Dutta J.M. Vlahovic B. Nemanich R.J.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.61, Iss.2, 2001-05, pp. : 303-308

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