Growth of highly (0001)-oriented aluminum nitride thin films with smooth surfaces on silicon carbide by gas-source molecular beam epitaxy

Author: Kern R.S.   Smith S.A.   Jarrendahl K.   Zheleva T.   Davis R.F.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.49, Iss.3, 1998-03, pp. : 189-191

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Abstract