Development of a locally electron-heated plasma source

Author： Seki H. Kitazawa S. Ueno Y. Wada N. Takemori S. Sato T. Uchikawa S. Setoyama E.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.59, Iss.2, 2000-11, pp. : 445-450

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