Resistivity of Si-Ni and Si-Ta layers made by magnetron sputtering method

Author： Berlicki T.M. Beensh-Marchwicka G. Prociow E.L. Osadnik S.J.

Publisher： Elsevier

ISSN： 0042-207X

Source： Vacuum, Vol.65, Iss.2, 2002-04, pp. : 169-175

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