Formation of C x N y films by high dose nitrogen implantation in the layered structures

Author: Komarov A.F.   Komarov F.F.   Mironov A.M.   Nikiforenko N.N.   Maczka D.   Kamyshan A.F.  

Publisher: Elsevier

ISSN: 0042-207X

Source: Vacuum, Vol.70, Iss.2, 2003-03, pp. : 141-145

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Abstract