Direct observation of dislocations propagated from 4H-SiC substrate to epitaxial layer by X-ray topography

Author: Ohno T.   Yamaguchi H.   Kuroda S.   Kojima K.   Suzuki T.   Arai K.  

Publisher: Elsevier

ISSN: 0022-0248

Source: Journal of Crystal Growth, Vol.260, Iss.1, 2004-01, pp. : 209-216

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