Formation of the thermal donors in the hydrogen-implanted nitrogen-doped silicon crystal

Author： Antonova I.V.   Yang D.   Popov V.P.   Obodnikov V.I.   Misiuk A.  

Publisher： Elsevier

ISSN： 0167-9317

Source： Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 367-372

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