Publisher: Elsevier
ISSN: 0167-9317
Source: Microelectronic Engineering, Vol.66, Iss.1, 2003-04, pp. : 773-778
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
By Deb K. Tamagawa T. Di Y. Gui G. Halpern B. Schmitt J.
Journal of Electronic Materials, Vol. 30, Iss. 2, 2001-02 ,pp. :
By Chu M.W. Ganne M. Tessier P.Y. Eon D. Caldes M.T. Brohan L.
Materials Science in Semiconductor Processing, Vol. 5, Iss. 2, 2002-04 ,pp. :
By Kubo Toshiharu Freedsman Joseph J Iwata Yasuhiro Egawa Takashi
Semiconductor Science and Technology, Vol. 29, Iss. 4, 2014-04 ,pp. :