Properties of ZrO 2 thin films prepared by laser ablation

Author： Vrejoiu I. Matei D.G. Morar M. Epurescu G. Ferrari A. Balucani M. Lamedica G. Dinescu G. Grigoriu C. Dinescu M.

Publisher： Elsevier

ISSN： 1369-8001

Source： Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 253-257

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