PTFE nanoemulsions as ultralow-k dielectric materials

Author： Machetta P. Lazzarino M. Carrato S. Schmidt C. Canil G. Kapeliouchko V. Poggio T. Sanguineti A.

Publisher： Elsevier

ISSN： 1369-8001

Source： Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 285-290

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