Electrical properties of low-dielectric-constant films prepared by PECVD in O 2 /CH 4 /HMDSO

Author: Borvon G.   Goullet A.   Mellhaoui X.   Charrouf N.   Granier A.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.2, 2002-04, pp. : 279-284

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