Active control of melt convection of silicon by electromagnetic force under cusp-shaped magnetic fields

Author: Kakimoto K.   Tashiro A.   Ishii H.   Shinozaki T.  

Publisher: Elsevier

ISSN: 1369-8001

Source: Materials Science in Semiconductor Processing, Vol.5, Iss.4, 2002-08, pp. : 341-345

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Abstract