Polysilicon nanogap fabrication using a thermal oxidation process

Author: Dhahi T.S.   Hashim U.   Ali M.E.   Taib Nazwa  

Publisher: Emerald Group Publishing Ltd

ISSN: 1356-5362

Source: Microelectronics International, Vol.29, Iss.1, 2012-01, pp. : 40-46

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Abstract