Microsampling technique for EBSP inspection on the cross-sections of copper trench lines in ULSIs

By Hirose Yukinori   Hashikawa Naoto   Fukumoto Koji   Mashiko Yoji  

Journal of Electron Microscopy, Vol. 53, Iss. 5, 2004-10 ,pp. : 567-570

Oxford University Press

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Side-milling technique of preparing device cross-sections for electron holography based on a focused ion beam micro-sampling system

By Wang Zhouguang   Kato Takeharu   Hirayama Tsukasa  

Journal of Electron Microscopy, Vol. 53, Iss. 5, 2004-10 ,pp. : 489-491

Oxford University Press

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In-situ TEM Observation of Phase Transformation Processes in Cu 3 Pt with a Long-Period Superstructure

By Matsumoto Akiyoshi   Matsuno Kouichi   Chiwata Nobuhiko   Kuwano Noriyuki   Oki Kensuke  

Journal of Electron Microscopy, Vol. 45, Iss. 5, 1996-10 ,pp. : 442-447

Oxford University Press

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A study of the damage on FIB-prepared TEM samples of Al x Ga 1−x As

By Yabuuchi Yasufumi  

Journal of Electron Microscopy, Vol. 53, Iss. 5, 2004-10 ,pp. : 471-477

Oxford University Press

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Application of FIB with micro pick-up to microstructural study of irradiated SiC/SiC composites

By Ozawa Kazumi  

Journal of Electron Microscopy, Vol. 53, Iss. 5, 2004-10 ,pp. : 519-521

Oxford University Press

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