Nondestructive contactless electron-beam diagnostics of microelectronic device structures

Author: Aleksandrov A.   Ditsman S.   Luk’yanov F.   Orlikovskii N.   Rau E.   Sennov R.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7397

Source: Russian Microelectronics, Vol.39, Iss.5, 2010-09, pp. : 303-312

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content