Single digit nanofabrication by step-and-repeat nanoimprint lithography

Author： Peroz C   Dhuey S   Cornet M   Vogler M   Olynick D   Cabrini S  

Publisher： IOP Publishing

ISSN： 0957-4484

Source： Nanotechnology, Vol.23, Iss.1, 2012-01, pp. : 15305-15309

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