HIGH-TEMPERATURE AMORPHOUS HAFNIA (HfO 2 ) FOR MICROELECTRONICS

Author: MIYAKE M.   LOU X.   ZHANG MING   MORRISON F.   LEEDHAM T.   TATSUTA T.   TSUJI O.   SCOTT J.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.74, Iss.1, 2005-09, pp. : 165-172

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Abstract