NITROGEN-RICH TITANIUM NITRIDE SERVING as Pt-Al DIFFUSION BARRIER FOR FeRAM APPLICATION

Author: Xue Kan-Hao   Ren Tian-Ling   Xie Dan   Jia Ze   Zhang Ming-Ming   Liu Li-Tian  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.96, Iss.1, 2008-01, pp. : 19-26

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