Characterization of a vertically movable gate field effect transistor using a silicon-on-insulator wafer

Author: Song In-Hyouk   Forfang William B D   Cole Bryan    

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.10, 2014-10, pp. : 105002-105009

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