Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C2H2 discharges

Author： Xiang-Mei Liu   Qi-Nan Li   Xiang Xu  

Publisher： IOP Publishing

ISSN： 1674-1056

Source： Chinese Physics B, Vol.23, Iss.8, 2014-08, pp. : 85202-85207

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C2H2 discharges

By Xiang-Mei Liu   Qi-Nan Li   Rui Li  

Chinese Physics B, Vol. 24, Iss. 7, 2015-07 ,pp. : 75204-75209

IOP Publishing

Access to resources Recommend Favorite

The electrical asymmetry effect in capacitively coupled radio-frequency discharges

By Czarnetzki U   Schulze J   Schüngel E   Donkó Z  

Plasma Sources Science and Technology, Vol. 20, Iss. 2, 2011-04 ,pp. : 24010-24024

IOP Publishing

Access to resources Recommend Favorite

The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

By Schulze J   Schüngel E   Donkó Z   Czarnetzki U  

Plasma Sources Science and Technology, Vol. 20, Iss. 1, 2011-02 ,pp. : 15017-15028

IOP Publishing

Access to resources Recommend Favorite

Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O 2 discharges

By Liu Jia   Zhang Quan-Zhi   Liu Yong-Xin   Gao Fei   Wang You-Nian  

Journal of Physics D: Applied Physics, Vol. 46, Iss. 23, 2013-06 ,pp. : 235202-235209

IOP Publishing

Access to resources Recommend Favorite