The electrical asymmetry effect in multi-frequency capacitively coupled radio frequency discharges

By Schulze J   Schüngel E   Donkó Z   Czarnetzki U  

Plasma Sources Science and Technology, Vol. 20, Iss. 1, 2011-02 ,pp. : 15017-15028

IOP Publishing

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The electrical asymmetry effect in capacitively coupled radio-frequency discharges

By Czarnetzki U   Schulze J   Schüngel E   Donkó Z  

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Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

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Plasma Sources Science and Technology, Vol. 25, Iss. 1, 2016-02 ,pp. : 13001-13022

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Ion flux asymmetry in radiofrequency capacitively-coupled plasmas excited by sawtooth-like waveforms

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Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O 2 discharges

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