Patterning of light-extraction nanostructures on sapphire substrates using nanoimprint and ICP etching with different masking materials

Author： Chen Hao   Zhang Qi   Chou Stephen Y  

Publisher： IOP Publishing

E-ISSN： 1361-6528|26|8|85302-85309

ISSN： 0957-4484

Source： Nanotechnology, Vol.26, Iss.8, 2015-02, pp. : 85302-85309

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