Formation of nanodimensional structures on surfaces of GaAs and Si by means of ion implantation

Publisher: John Wiley & Sons Inc

E-ISSN: 1610-1642|12|1‐2|89-93

ISSN: 1862-6351

Source: PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.12, Iss.1‐2, 2015-01, pp. : 89-93

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Abstract