Minimizing stress in large-area surface micromachined perforated membranes with slits

Author： Ghaderi M Ayerden N P de Graaf G Wolffenbuttel R F

E-ISSN： 1361-6439|25|7|74010-74018

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74010-74018

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