Optical detection system for MEMS-type pressure sensor

Author: Sareło K   Górecka-Drzazga A   Dziuban J A  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|7|74009-74016

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74009-74016

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