Parametric study of electroplating conditions on mismatch strain of thin film for self-positioning of MEMS

E-ISSN： 1361-6439|25|7|75011-75019

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 75011-75019

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