Investigation of a zirconia co-fired ceramic calorimetric microsensor for high-temperature flow measurements

Author： Lekholm Ville Persson Anders Klintberg Lena Thornell Greger

E-ISSN： 1361-6439|25|6|65014-65023

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.6, 2015-06, pp. : 65014-65023

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