Molecular dynamics study on splitting of hydrogen-implanted silicon in Smart-Cut® technology

Author: Bing Wang   Bin Gu   Rongying Pan   Sijia Zhang   Jianhua Shen  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.36, Iss.3, 2015-03, pp. : 36003-36008

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Abstract