Fabricating a multi-level barrier-integrated microfluidic device using grey-scale photolithography

Author: Nam Yoonkwang   Kim Minseok   Kim Taesung  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.10, 2013-10, pp. : 105015-105021

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