Influences of pretreatment and hard baking on the mechanical reliability of SU-8 microstructures

Author： Morikaku Toshiyuki Kaibara Yoshinori Inoue Masatoshi Miura Takuya Suzuki Takaaki Oohira Fumikazu Inoue Shozo Namazu Takahiro

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.10, 2013-10, pp. : 105016-105025

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