Integration of nano-scale components and supports in micromachined 3D silicon structures

Author： Song J   Azimi S   Dang Z Y   Breese M B H  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.4, 2014-04, pp. : 45008-45016

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Concepts and issues in piezo-on-3D silicon structures

By Sweet John Henry   Hutson David   Cochran Sandy   Bernassau Anne  

Sensor Review, Vol. 29, Iss. 4, 2009-09 ,pp. : 326-332

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

The Effect of Nano-Scale Local Defects on Mechanical Properties of Silicon and Diamond Films

By Sun S. C.   Huang C. Y.   Hsu Chao Ming   Kuang Jao Hwa  

Integrated Ferroelectrics, Vol. 143, Iss. 1, 2013-01 ,pp. : 1-9

Taylor & Francis Ltd

Access to resources Recommend Favorite

Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon

By Noeth A.   Yamada T.   Tagantsev A. K.   Setter N.  

Integrated Ferroelectrics, Vol. 115, Iss. 1, 2010-01 ,pp. : 110-119

Taylor & Francis Ltd

Access to resources Recommend Favorite

3D micro- and nano-machining of hydrogenated amorphous silicon films on SiO2/Si and glass substrates

By Soleimani-Amiri S   Zanganeh S   Ramzani R   Talei R   Mohajerzadeh S   Azimi S   Sanaee Z  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 7, 2015-07 ,pp. : 74004-74012

IOP Publishing

Access to resources Recommend Favorite