Photoluminescence and X-ray topography measurements onoxidation-induced stacking faults in silicon wafers

Author: Kakui H.   Fukuzawa M.   Shiraishi Y.   Yamada M.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|27|1-3|447-450

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 447-450

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Abstract