Fabrication of diffraction grating for X-ray Talbot interferometer

Author： Matsumoto Masatake Takiguchi Kinji Tanaka Makoto Hunabiki Yoichi Takeda Hiroaki Momose Atsushi Utsumi Yuichi Hattori Tadashi

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.5-6, 2007-03, pp. : 543-546

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