Surface Morphology of Titanium Oxide and Oxynitride Coatings Deposited by Reactive Magnetron Sputtering

Publisher: Trans Tech Publications

E-ISSN: 1662-8985|2015|1085|134-138

ISSN: 1022-6680

Source: Advanced Materials Research, Vol.2015, Iss.1085, 2015-02, pp. : 134-138

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Abstract