A microelectrostatic repulsive-torque rotation actuator with two-width fingers

Author: Fan Chao   He Siyuan  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|9|95006-95014

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.9, 2015-09, pp. : 95006-95014

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Abstract