Manufacture and Characterization of High Q-Factor Inductors Based on CMOS-MEMS Techniques

Author： Yang Ming-Zhi   Dai Ching-Liang   Hong Jin-Yu  

Publisher： MDPI

E-ISSN： 1424-8220|11|10|9798-9806

ISSN： 1424-8220

Source： Sensors, Vol.11, Iss.10, 2011-10, pp. : 9798-9806

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