Electrothermal Actuators for SiO2 Photonic MEMS

Author： Peters Tjitte-Jelte   Tichem Marcel  

Publisher： MDPI

E-ISSN： 2072-666x|7|11|200-200

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.11, 2016-11, pp. : 200-200

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