Numerical study of dual-frequency capacitively-coupled discharges in electronegative $\chem{SF_{6}}$

Publisher: Edp Sciences

E-ISSN: 1286-4854|75|1|63-69

ISSN: 0295-5075

Source: EPL (EUROPHYSICS LETTERS), Vol.75, Iss.1, 2006-07, pp. : 63-69

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