Chemisorption on -SiC and amorphous SiO 2 during CVD of silicon carbide from the Si-C-H-Cl system. Correlations with the nucleation

Author： Lespiaux D.   Langlais F.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.265, Iss.1, 1995-09, pp. : 40-51

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