Electron microscopy characterization of TiN films on Si, grown by d.c. reactive magnetron sputtering

Author： Pecz B. Frangis N. Logothetidis S. Alexandrou I. Barna P.B. Stoemenos J.

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.268, Iss.1, 1995-11, pp. : 57-63

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