In-situ spectroscopic ellipsometry for monitoring the Ti&unknown;Si multilayers during growth and annealing

Author: Logothetidis S.   Alexandrou I.   Vouroutzis N.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.275, Iss.1, 1996-04, pp. : 44-47

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