Beam size and collimation effects in spectroscopic ellipsometry of transparent films with optical thickness inhomogeneity

Author： El Rhaleb H.   Cella N.   Roger J.P.   Boccara A.C.   Fournier D.   Zuber A.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.288, Iss.1, 1996-11, pp. : 125-131

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Optical Characterization of Graphene Oxide Films by Spectroscopic Ellipsometry

By  

Materials Science Forum, Vol. 2016, Iss. 851, 2016-05 ,pp. : 199-204

Trans Tech Publications

Access to resources Recommend Favorite

Determination of the thickness of thin silane films on aluminium surfaces by means of spectroscopic ellipsometry

By Franquet A.   De Laet J.   Schram T.   Terryn H.   Subramanian V.   van Ooij W.J.   Vereecken J.  

Thin Solid Films, Vol. 384, Iss. 1, 2001-03 ,pp. : 37-45

Elsevier

Access to resources Recommend Favorite

Optical properties of nanophase films measured by variable-angle spectroscopic ellipsometry

By Urban F.K.   Hosseini-Tehrani A.   Khabari A.   Griffiths P.   Bungay C.   Petrov I.   Kim Y.  

Thin Solid Films, Vol. 408, Iss. 1, 2002-04 ,pp. : 211-217

Elsevier

Access to resources Recommend Favorite

The optical and structural properties of AlN thin films characterized by spectroscopic ellipsometry

By Joo H.Y.   Kim H.J.   Kim S.J.   Kim S.Y.  

Thin Solid Films, Vol. 368, Iss. 1, 2000-06 ,pp. : 67-73

Elsevier

Access to resources Recommend Favorite

Annealing effects on silicon-rich oxide films studied by spectroscopic ellipsometry

By Spiga S.   Tallarida G.   Borghesi A.   Sassella A.   De Santi G.  

Thin Solid Films, Vol. 325, Iss. 1, 1998-07 ,pp. : 36-41

Elsevier

Access to resources Recommend Favorite