Author: Lebib S. Schoisswohl M. Cantin J.L. Von Bardeleben H.J.
Publisher: Elsevier
ISSN: 0040-6090
Source: Thin Solid Films, Vol.294, Iss.1, 1997-02, pp. : 242-245
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Ge-induced enhancement of solid-phase crystallization of Si on SiO 2
By Yamaguchi S. Park S.-k. Sugii N. Nakagawa K. Miyao M.
Thin Solid Films, Vol. 369, Iss. 1, 2000-07 ,pp. :
CoSi 2 and TiSi 2 for Si/SiGe heterodevices
By Gluck M. Schuppen A. Rosler M. Heinrich W. Hersener J. Konig U. Yam O. Eizenberg M. Cytermann C.
Thin Solid Films, Vol. 270, Iss. 1, 1995-12 ,pp. :