Investigation of thin Al layer growth with in situ infrared spectroscopic ellipsometry

Author: Hausmann A.   Weidner G.   Weidner M.   Ritter G.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.318, Iss.1, 1998-04, pp. : 124-127

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Abstract